Products:
Electronics

Our portfolio includes a complete line of current and next generation of precursors for depositing ultra-thin dielectric and metal films, strippers, electroplating chemistry (copper through Silicon via plating chemistry) and equipment for delivering specialty chemicals with technical know-how to enable collaborative innovation.

High Purity Specialty Chemicals
Semiconductor Silicon
Application Chemicals
Doping TEB, TEPO, TMP, TMPO, IMPI BBr3, POCI3
Dielectrics TEOS, BTBAS, 2NTe, LTO-520
High K TMAI
Low K TOMCATS, 4MS (CVD low-K for Lam's Coral Process) DEMS, PDEMS (CVD ultra low-K AMAT Process)
Metallization TDMAT (CVD TiN) TiCL4, CupraSelect (CVD Cu)
Oxidation & Cleaning Trans-LC
High Purity Performance Chemicals

Strippers
Etchants
Photolithography related chemicals
Post-CMP cleaners

Ultra-Pure Process Chemicals

Acids
Bases
Solvents

Chemical delivery systems

Versum ChemGuard™

High Purity Metalorganics

Application: Compound Electronics & Si-Electronics industry

Trimethyaluminum (TMAI)
Low Ox-Trimethyaluminum (TMAI LO)
Triethyaluminum (TEAI)
Trimethygallium (TMGa)
Triethylgallium (TEGa)
Trimethyindium (TMln)
Bis(cyclopentadienyl)magnesium (Cp2Mg)
Dimethylzinc (DMZn)

>30

Approved Suppliers

>120

High Purity and Specialty Materials from USA, Japan, South Korea, Germany, China, Taiwan & Singapore